Uniaxial 3D shape measurement with projector defocusing

Ying Xu; Laura Ekstrand; Song Zhang

doi:10.1117/12.892362

14 September 2011 Uniaxial 3D shape measurement with projector defocusing

Ying Xu, Laura Ekstrand, Song Zhang

Proceedings Volume 8133, Dimensional Optical Metrology and Inspection for Practical Applications; 81330M (2011) https://doi.org/10.1117/12.892362
Event: SPIE Optical Engineering + Applications, 2011, San Diego, California, United States

Abstract

Our recent study showed that the phase error caused by improperly defocused binary structured patterns has a unique relationship with the depth z. Based on this finding, the depth information can be extracted without the need of triangulation. Because the measurement can be performed from the same viewing angle, this uniaxial measurement technique can overcome some limitations of a triangulation-based technique, such as measuring a deep hole. This paper will present the principle of the proposed technique and show some simulation and preliminary experimental results to verify its viability.

Citation Download Citation

Ying Xu, Laura Ekstrand, and Song Zhang "Uniaxial 3D shape measurement with projector defocusing", Proc. SPIE 8133, Dimensional Optical Metrology and Inspection for Practical Applications, 81330M (14 September 2011); https://doi.org/10.1117/12.892362

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available