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30 September 2011 Reflection coefficients and optical admittances loci monitoring for thin film coatings and its applications to optical systems
Cheng-Chung Lee, Kai Wu, Yu-Jen Chen
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Proceedings Volume 8172, Optical Complex Systems: OCS11; 81720Y (2011) https://doi.org/10.1117/12.899755
Event: SPIE Optical Systems Design, 2011, Marseille, France
Abstract
point. This monitoring method is derived from a traditional optical monitor structure. The corresponding error compensations were applied to get good output. Another optical monitoring system is also demonstrated to extract the temporal phase change of the reflection coefficient of the growing film stack. A vibration and air turbulence insensitive polarization interferometers was used in this system to directly detect fluctuating phase and magnitude of the reflection coefficient of a growing film stack as well as the real time optical admittance at normal incidence.
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Cheng-Chung Lee, Kai Wu, and Yu-Jen Chen "Reflection coefficients and optical admittances loci monitoring for thin film coatings and its applications to optical systems", Proc. SPIE 8172, Optical Complex Systems: OCS11, 81720Y (30 September 2011); https://doi.org/10.1117/12.899755
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KEYWORDS
Reflection
Refractive index
Thin films
Reflectivity
Interferometers
Cameras
Phase shifts
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