A Comparison Between Measured Surface Microtopography And Observed Scattering In The Extreme Ultraviolet

James Green; Sharon Jelinsky; Stuart Bowyer; Roger F. Malina

doi:10.1117/12.942162

9 August 1988 A Comparison Between Measured Surface Microtopography And Observed Scattering In The Extreme Ultraviolet

James Green, Sharon Jelinsky, Stuart Bowyer, Roger F. Malina

Proceedings Volume 0830, Grazing Incidence Optics for Astronomical and Laboratory Applications; (1988) https://doi.org/10.1117/12.942162
Event: 31st Annual Technical Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, San Diego, CA, United States

Abstract

We present comparative measurements of surface roughness on prepared samples. These measurements have been made with both Talystep profilometers and WYKO interferometers. In addition, we have measured scattering distribution from these samples at extreme ultra-violet wavelengths. The utility of the WYKO interferometer and Talystep device for specifying extreme ultraviolet mirror surface quality is discussed.

Citation Download Citation

James Green, Sharon Jelinsky, Stuart Bowyer, and Roger F. Malina "A Comparison Between Measured Surface Microtopography And Observed Scattering In The Extreme Ultraviolet", Proc. SPIE 0830, Grazing Incidence Optics for Astronomical and Laboratory Applications, (9 August 1988); https://doi.org/10.1117/12.942162

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available