Comparison of various structures of CMOS photodiodes in terms of dark current, photocurrent, and quantum efficiency

Andrei Drӑgulinescu

doi:10.1117/12.966388

1 November 2012 Comparison of various structures of CMOS photodiodes in terms of dark current, photocurrent, and quantum efficiency

Andrei Drӑgulinescu

Author Affiliations +

Proceedings Volume 8411, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies VI; 84111C (2012) https://doi.org/10.1117/12.966388
Event: Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies 2012, 2012, Constanta, Romania

Abstract

Until now, very few systematic studies have been made for comparing various photodiode structures in terms of their performance characteristics. Most of the studies included only few structures, some of them only simulated, without experimental measurements. Unfortunately, all these studies comprised only a few photodiodes, and in our knowledge there is no extended study to compare all types of CMOS photodiodes, fabricated using various CMOS processes. In this paper we will try to fill in this empty space in this area, in order to provide an easier choice of the most appropriate CMOS photodiode (and thus of the CMOS image sensor) to be used in a certain application, according to the desired characteristics for each situation. We will review some important studies in which essential parameters for the characterization of the CMOS photodiode were evaluated: quantum efficiency, photocurrent and dark current. We consider that this paper will provide a useful reference for choosing the most suitable photodiode and CMOS image sensor for a very large area of applications.

Citation Download Citation

Andrei Drӑgulinescu "Comparison of various structures of CMOS photodiodes in terms of dark current, photocurrent, and quantum efficiency", Proc. SPIE 8411, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies VI, 84111C (1 November 2012); https://doi.org/10.1117/12.966388

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available