Ultra-precision surface polishing using ion beam figuring

Young-Sik Ghim; Shin-Jae You; Hyug-Gyo Rhee; Ho-Soon Yang; Yun-Woo Lee

doi:10.1117/12.973725

16 October 2012 Ultra-precision surface polishing using ion beam figuring

Young-Sik Ghim, Shin-Jae You, Hyug-Gyo Rhee, Ho-Soon Yang, Yun-Woo Lee

Proceedings Volume 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 84161O (2012) https://doi.org/10.1117/12.973725
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

Contrary to conventional mechanical polishing methods using polyurethane or pitch tool, non-contact polishing technique based on ion beam sputtering provides deterministic and ultra-precision surfacing at any given surfaces. Owing to no contact between a tool and a workpiece, several issues related to tool wear and edge effects can be evitable. Moreover, the atomic level sputtering makes it possible to obtain ultra-precision optical surfaces with a sub-nanometer surface roughness. In this paper, we have simulated ion beam figuring process according to the characteristics of ion beam and performed a simple test.

Citation Download Citation

Young-Sik Ghim, Shin-Jae You, Hyug-Gyo Rhee, Ho-Soon Yang, and Yun-Woo Lee "Ultra-precision surface polishing using ion beam figuring", Proc. SPIE 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 84161O (16 October 2012); https://doi.org/10.1117/12.973725

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