Study on profiler for big relative aperature aspherical surface

Yi Wang; Gufeng Qiu; Jing-Chi Yu

doi:10.1117/12.977257

15 October 2012 Study on profiler for big relative aperature aspherical surface

Yi Wang, Gufeng Qiu, Jing-Chi Yu

Proceedings Volume 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 841741 (2012) https://doi.org/10.1117/12.977257
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

Profiler is a popular metrology system to measure form shape error of aspherical surface, but precise measurement to big relative aperture aspherical surface could not be achieved by traditional profiler with cartesian coordinate system. A new profiler with polar coordinate system based in “small error” thoery is studied in this article. Firstly, the testing error of this new profiler is analized and corrected. Then, the correction capability is vertified by sorting of computer simulated testing results. In the end, the protyping profiler is explored, and the testing results are compared with Form Taylorsurf’s, the accuracy of this new profiler is consistent with predictive analysis. Key words: Profiler, aspherical surface, big relative aperture

Citation Download Citation

Yi Wang, Gufeng Qiu, and Jing-Chi Yu "Study on profiler for big relative aperature aspherical surface", Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 841741 (15 October 2012); https://doi.org/10.1117/12.977257

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