Low-cost unimorph deformable mirror with high actuator count for astronomical adaptive optics

Jianqiang Ma; Ying Liu; Chen Xu; Hao Rong; Baoqing Li; Jiaru Chu

doi:10.1117/12.925522

13 September 2012 Low-cost unimorph deformable mirror with high actuator count for astronomical adaptive optics

Jianqiang Ma, Ying Liu, Chen Xu, Hao Rong, Baoqing Li, Jiaru Chu

Proceedings Volume 8447, Adaptive Optics Systems III; 844707 (2012) https://doi.org/10.1117/12.925522
Event: SPIE Astronomical Telescopes + Instrumentation, 2012, Amsterdam, Netherlands

Abstract

A low-cost silicon unimorph deformable mirror (DM) with 214 actuators is presented. The finite element simulation indicates that the designed DM has an excellent correction performance for both low order and high order aberrations. The experimental actuator deflection is about 2μm at 100V. This DM has the potential to be used for astronomical adaptive optics.

Citation Download Citation

Jianqiang Ma, Ying Liu, Chen Xu, Hao Rong, Baoqing Li, and Jiaru Chu "Low-cost unimorph deformable mirror with high actuator count for astronomical adaptive optics", Proc. SPIE 8447, Adaptive Optics Systems III, 844707 (13 September 2012); https://doi.org/10.1117/12.925522

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