Characterization of traps in SiGe:C channel heterojunction PMOSFETs

C. Mukherjee; C. K. Maiti

doi:10.1117/12.924516

15 October 2012 Characterization of traps in SiGe:C channel heterojunction PMOSFETs

C. Mukherjee, C. K. Maiti

Proceedings Volume 8549, 16th International Workshop on Physics of Semiconductor Devices; 85491L (2012) https://doi.org/10.1117/12.924516
Event: 16th International Workshop on Physics of Semiconductor Devices, 2011, Kanpur, India

Abstract

In this work, inelastic tunneling spectroscopy (IETS) of SiGe:C channel heterojunction PMOSFETs has been used to study the modes of vibrations (due to molecular species and phonons) present in the tunneling junctions and also to characterize the traps responsible for trapping/de-trapping of channel carriers. Peaks observed in the second derivative spectra of the drain-current provided information for identification of various traps and defects in the metal-insulatorsemiconductor (MIS) structures for thin tunneling oxide present in the SiGe:C PMOSFETs. Both the optical and acoustic phonons are observed for SiGe, SiO₂ and Si-C. From the spectra obtained by varying gate voltage between 180-350 mV (in both forward and reverse bias), the trapping/de-trapping process has been observed which comprises of charge trapping and trap-assisted conduction phenomena. The traps that take part in the trapping of carriers are also identified from the results.

Citation Download Citation

C. Mukherjee and C. K. Maiti "Characterization of traps in SiGe:C channel heterojunction PMOSFETs", Proc. SPIE 8549, 16th International Workshop on Physics of Semiconductor Devices, 85491L (15 October 2012); https://doi.org/10.1117/12.924516

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available