Co/Mo2C mirror as studied by x-ray fluorescence and photoelectron spectroscopies induced by x-ray standing waves

P. Jonnard; K. Le Guen; Y. Y. Yuan; J.-M. André; S. Mukherjee; A. Giglia; S. Nannarone; N. Mahne; Z.-S. Wang; H.-C. Li; J.-T. Zhu

doi:10.1117/12.980893

18 December 2012 Co/Mo₂C mirror as studied by x-ray fluorescence and photoelectron spectroscopies induced by x-ray standing waves

P. Jonnard, K. Le Guen, Y. Y. Yuan, J.-M. André, S. Mukherjee, A. Giglia, S. Nannarone, N. Mahne, Z.-S. Wang, H.-C. Li, J.-T. Zhu

Author Affiliations +

Proceedings Volume 8550, Optical Systems Design 2012; 85501D (2012) https://doi.org/10.1117/12.980893
Event: SPIE Optical Systems Design, 2012, Barcelona, Spain

Abstract

We study a periodic Co/Mo₂C multilayer prepared by magnetron sputtering. The period is 4.1 nm and the sample is designed to work around 778 eV, i.e. close to the Co 2p_3/2 threshold, at a glancing angle of 11°. In this condition, strong x-ray standing waves set up within the sample. In order to probe different depths within the stack, particularly the interfaces, the glancing angle is moved along the first Bragg peak, while, the B 1s, C 1s, Mo 3d or O 1s photoelectron spectra, the Co Lα x-ray spectrum as well as the drain current of the sample are measured. Boron is present in the 3.5 nm B₄C capping layer and oxygen is from surface contamination. The photoelectrons bring information from the superficial zone, i.e. the 5 first nm, while the characteristic x-rays probe the whole stack. Clear modulations of the intensity of the studied signals as well as core level shifts are observed when going through the Bragg peak. In order to understand what happens in the multilayer calculations of depth distributions of the electric field and the energy loss by the radiation are made with the IMD and OPAL codes, respectively. The combination of experimental results and theoretical simulations will enable us to determine from which place originate the various signals and to know if some interaction exists between the Co and Mo₂C layers.

Citation Download Citation

P. Jonnard, K. Le Guen, Y. Y. Yuan, J.-M. André, S. Mukherjee, A. Giglia, S. Nannarone, N. Mahne, Z.-S. Wang, H.-C. Li, and J.-T. Zhu "Co/Mo₂C mirror as studied by x-ray fluorescence and photoelectron spectroscopies induced by x-ray standing waves", Proc. SPIE 8550, Optical Systems Design 2012, 85501D (18 December 2012); https://doi.org/10.1117/12.980893

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available