Surface analysis of free-standing GaN substrates with polar, non-polar, and semipolar crystal orientations

O. Romanyuk; P. Jiříček; P. Mutombo; T. Paskova; I. Bartoš

doi:10.1117/12.2006400

27 March 2013 Surface analysis of free-standing GaN substrates with polar, non-polar, and semipolar crystal orientations

O. Romanyuk, P. Jiříček, P. Mutombo, T. Paskova, I. Bartoš

Author Affiliations +

Proceedings Volume 8625, Gallium Nitride Materials and Devices VIII; 86252I (2013) https://doi.org/10.1117/12.2006400
Event: SPIE OPTO, 2013, San Francisco, California, United States

Abstract

Surface structure of the free-standing GaN substrates with polar (000-1), non-polar (1-100), (11-20), and semipolar (20- 21) surface plane were investigated. Clean polar and non-polar GaN surfaces were prepared by annealing under NH₃ atmosphere. (1x1) diffraction patterns were observed by low-energy electron diffraction (LEED) for both polar and non-polar GaN surfaces. The polar GaN surface was found well-ordered, while the non-polar GaN surfaces were found less ordered with atomic steps on the surface. Polar angle dependences of the photoelecton diffraction (PED) intensities exited by MgKα radiation from N 1s level were analyzed for all the GaN surfaces, aiming to determine the polarities of the GaN surfaces with polar and semipolar crystal orientations.

Citation Download Citation

O. Romanyuk, P. Jiříček, P. Mutombo, T. Paskova, and I. Bartoš "Surface analysis of free-standing GaN substrates with polar, non-polar, and semipolar crystal orientations", Proc. SPIE 8625, Gallium Nitride Materials and Devices VIII, 86252I (27 March 2013); https://doi.org/10.1117/12.2006400

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