Paper
30 January 2013 Comparisons of various surface erosions with a variety of laser lights and the applications
Koichi Kasuya, Waldemar Mroz, Boguslaw Budner, Shinji Motokoshi, Katsuhiro Mikami, Takayoshi Norimatsu
Author Affiliations +
Proceedings Volume 8677, XIX International Symposium on High-Power Laser Systems and Applications 2012; 867719 (2013) https://doi.org/10.1117/12.2010548
Event: XIX International Symposium on High-Power Laser Systems and Applications, 2012, Istanbul, Turkey
Abstract
The new method to estimate the erosion threshold of various material surfaces with high power pulsed electron beam was extended to the surface erosions with various pulsed laser lights. We are interested in the erosions of candidate materials to be useful under very severe eovironmental conditions with various laser lights, including ArF and Nd:YAG laser lights.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Koichi Kasuya, Waldemar Mroz, Boguslaw Budner, Shinji Motokoshi, Katsuhiro Mikami, and Takayoshi Norimatsu "Comparisons of various surface erosions with a variety of laser lights and the applications", Proc. SPIE 8677, XIX International Symposium on High-Power Laser Systems and Applications 2012, 867719 (30 January 2013); https://doi.org/10.1117/12.2010548
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Sensors

Diamond

Head

Laser applications

Chemical vapor deposition

Inspection

Microscopes

Back to Top