Carrier frequency removal in phase measuring deflectometry with non-telecentric imaging

Huimin Yue; Yuxiang Wu; Lei Song; Biyu Zhao; Zhonghua Ou; Yong Liu

doi:10.1117/12.2018711

22 June 2013 Carrier frequency removal in phase measuring deflectometry with non-telecentric imaging

Huimin Yue, Yuxiang Wu, Lei Song, Biyu Zhao, Zhonghua Ou, Yong Liu

Proceedings Volume 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013); 87691L (2013) https://doi.org/10.1117/12.2018711
Event: International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 2013, Singapore, Singapore

Abstract

In phase measuring deflectometry (PMD), the fringe pattern deformed according to slope deviation of a specular surface is digitized employing a phase-shift technique. Without height-angle ambiguity, carrier-removal process is adopted to evaluate the variation of surface slope from phase distribution when a quasi-plane is measured. This paper investigates nonlinear carrier components introduced by the generalized imaging process in PMD and the nonlinear carrier removal methods. To remove the nonlinear carrier components in PMD, the reference subtraction technique, series-expansion technique and Zernike polynomials which are normally used in fringe projection profilometry are analyzed on accuracy, processing time and experimental simplicity. What’s more, a new nonlinear carrier removal technique is proposed according to the analytical expression of carrier phase. The theoretical analysis and the experiment results show that the new technique is accurate, simple and time-saving.

Citation Download Citation

Huimin Yue, Yuxiang Wu, Lei Song, Biyu Zhao, Zhonghua Ou, and Yong Liu "Carrier frequency removal in phase measuring deflectometry with non-telecentric imaging", Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 87691L (22 June 2013); https://doi.org/10.1117/12.2018711

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available