Modeling and optimization of high index contrast gratings with aperiodic topologies

Milan Maksimovic

doi:10.1117/12.2021018

13 May 2013 Modeling and optimization of high index contrast gratings with aperiodic topologies

Milan Maksimovic

Proceedings Volume 8789, Modeling Aspects in Optical Metrology IV; 87890L (2013) https://doi.org/10.1117/12.2021018
Event: SPIE Optical Metrology 2013, 2013, Munich, Germany

Abstract

High-contrast gratings (HCG) are the ultra-thin elements set to operate in near-wavelength regime with the period of the grating smaller then wavelength and with the high-index grating fully surrounded by low-index material. We concentrate on topics scarcely explored in the literature such as the spectral response phenomenology of HCGs with the complex unit cells. We show that the spectral response is robust under the symmetric unit cell perturbations, while asymmetric unit cell perturbations may introduce completely new spectral response. Further, we show examples of highly fragmented spectra present in the case of HCGs with the aperiodic topology in the unit cell. Our results can serve as guidance for the design of the complex HCGs and help with the choice of the efficient initial grating topology prior to global optimization procedure.

Citation Download Citation

Milan Maksimovic "Modeling and optimization of high index contrast gratings with aperiodic topologies", Proc. SPIE 8789, Modeling Aspects in Optical Metrology IV, 87890L (13 May 2013); https://doi.org/10.1117/12.2021018

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