A robotized six degree of freedom stage for optical microscopy

M. Z. Avramov; I. Ivanov; V. Pavlov; K. Zaharieva

doi:10.1117/12.2021461

23 May 2013 A robotized six degree of freedom stage for optical microscopy

M. Z. Avramov, I. Ivanov, V. Pavlov, K. Zaharieva

Proceedings Volume 8791, Videometrics, Range Imaging, and Applications XII; and Automated Visual Inspection; 87910Q (2013) https://doi.org/10.1117/12.2021461
Event: SPIE Optical Metrology 2013, 2013, Munich, Germany

Abstract

This work represents an investigation of the possibility to use a hexapod system for optical microscopy investigation and measurements. An appropriate hexapod stage has been developed. The stage has been calibrated and used for several different optical microscopy applications. The construction of the stage is based on the classic Stewart platform and thus represents a parallel robot with 6 degree of freedom. Appropriate software is controlling the transformation of the 3 position coordinates of the moving plate and the 3 Euler angles in position velocities and accelerations of the plate motion. An embedded microcontroller is implementing the motion plan and the PID controller regulating the kinematics. By difference to the available in the market hexapods the proposed solution is with lower precision but is significantly cheaper and simple to maintain. The repeatability obtained with current implementation is 0,05 mm and 0,001 rad. A specialized DSP based video processing engine is used for both feedback computation and application specific image processing in real-time. To verify the concept some applications has been developed for specific tasks and has been used for specific measurements.

Citation Download Citation

M. Z. Avramov, I. Ivanov, V. Pavlov, and K. Zaharieva "A robotized six degree of freedom stage for optical microscopy", Proc. SPIE 8791, Videometrics, Range Imaging, and Applications XII; and Automated Visual Inspection, 87910Q (23 May 2013); https://doi.org/10.1117/12.2021461

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