Tantalum oxide bio-photonics thin film grown by Gas-timing innovation technique

N. Khemasiri; S. Porntheeraphat; M. Horprathum; C. Chananonnawathorn; W. Bunjongpru; D. Phromyothin; S. Pratontep; J. Nukeaw

doi:10.1117/12.2022096

7 June 2013 Tantalum oxide bio-photonics thin film grown by Gas-timing innovation technique

N. Khemasiri, S. Porntheeraphat, M. Horprathum, C. Chananonnawathorn, W. Bunjongpru, D. Phromyothin, S. Pratontep, J. Nukeaw

Author Affiliations +

Proceedings Volume 8883, ICPS 2013: International Conference on Photonics Solutions; 88830B (2013) https://doi.org/10.1117/12.2022096
Event: International Conference on Photonics Solutions 2013, 2013, Pattaya City, Thailand

Abstract

Tantalum oxide (Ta_xO_y) as high refractive index material has been grown on p-type silicon and quartz substrates by R.F. magnetron sputtering with our innovative technique called “reactive-gas timing”. The reactive gas timing technique is an on-off time period sequence between argon (Ar) and oxygen (O₂) plasma during sputtering process. The technique of gas-timing plays the effect on the properties of Ta_xO_y thin film. The bombarded Ar-plasma was varied at 2, 5 and 8 sec, while the period of reactive O₂-plasma was kept at 5 sec in this experiment. The physical and optical properties were investigated by using X-ray diffraction (XRD), Atomic Force Microscope (AMF), UV-Visible spectrometer and Spectroscopic Ellipsometer, respectively. The XRD spectra and AFM photographs show all films are amorphous phase with smooth feature. Meanwhile the transmittance of sputtered thin film decreases with 10% and the absorption edge shifts to lower energy with the increasing of the argon period from 2 sec to 8 sec. The refractive index as showed by ellipsometry slightly increases from 2.08 to 2.17 at wavelength 550 nm with the increasing of argon period from 2 sec to 8 sec. The increasing of the refractive index might dues to tantalum (Ta) rich which consists in thin films. The Ar-plasma period in the deposited film plays an important role on the properties of the Ta_xO_y thin films especially as optical refractive index material.

Citation Download Citation

N. Khemasiri, S. Porntheeraphat, M. Horprathum, C. Chananonnawathorn, W. Bunjongpru, D. Phromyothin, S. Pratontep, and J. Nukeaw "Tantalum oxide bio-photonics thin film grown by Gas-timing innovation technique", Proc. SPIE 8883, ICPS 2013: International Conference on Photonics Solutions, 88830B (7 June 2013); https://doi.org/10.1117/12.2022096

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
7 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Tantalum

Thin films

Sputter deposition

Argon

Oxides

Refractive index

Optical properties

Show All Keywords

Keywords/Phrases

Search In:

Publication Years