Comparison of alignment errors in asphere metrology between an interferometric null-test measurement and a non-null measurement with the tilted-wave-interferometer

Goran Baer; Johannes Schindler; Christof Pruss; Wolfgang Osten

doi:10.1117/12.2028756

15 October 2013 Comparison of alignment errors in asphere metrology between an interferometric null-test measurement and a non-null measurement with the tilted-wave-interferometer

Goran Baer, Johannes Schindler, Christof Pruss, Wolfgang Osten

Author Affiliations +

Proceedings Volume 8884, Optifab 2013; 88840T (2013) https://doi.org/10.1117/12.2028756
Event: SPIE Optifab, 2013, Rochester, New York, United States

Abstract

In interferometric testing of surfaces a major task is to avoid the introduction of aberrations due to misalignment of the surface under test (SUT). An automated method for the positioning of aspheric and free-form surfaces in a non-null test interferometer, as well as a method for the distinction between alignment introduced aberrations and surface errors is presented. A combination of both methods allows for a fully automated alignment with low accuracy requirements concerning the positioning stage. In this work the method for the alignment as well as the alignment error correction is presented and the misalignment introduced measurement uncertainties are estimated. Simulation results as well as experimental results showing the feasibility of the method are presented.

Citation Download Citation

Goran Baer, Johannes Schindler, Christof Pruss, and Wolfgang Osten "Comparison of alignment errors in asphere metrology between an interferometric null-test measurement and a non-null measurement with the tilted-wave-interferometer", Proc. SPIE 8884, Optifab 2013, 88840T (15 October 2013); https://doi.org/10.1117/12.2028756

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