Improvements in the laser damage behavior of Ta2O5/SiO2 interference coatings by modification of the top layer design

D. Patel; D. Schiltz; P. F. Langton; L. Emmert; L. N. Acquaroli; C. Baumgarten; B. Reagan; J. J. Rocca; W. Rudolph; A. Markosyan; R. R. Route; M. Fejer; C. S. Menoni

doi:10.1117/12.2030380

19 November 2013 Improvements in the laser damage behavior of Ta₂O₅/SiO₂ interference coatings by modification of the top layer design

D. Patel, D. Schiltz, P. F. Langton, L. Emmert, L. N. Acquaroli, C. Baumgarten, B. Reagan, J. J. Rocca, W. Rudolph, A. Markosyan, R. R. Route, M. Fejer, C. S. Menoni

Author Affiliations +

Proceedings Volume 8885, Laser-Induced Damage in Optical Materials: 2013; 888522 (2013) https://doi.org/10.1117/12.2030380
Event: SPIE Laser Damage, 2013, Boulder, Colorado, United States

Abstract

We have investigated the properties and laser damage behavior of Ta₂O₅/SiO₂ quarter wave stacks designed for λ=1 μm operation by substituting the Ta₂O₅ layer by either Y₂O₃ or HfO₂ and the SiO₂ by Al₂O₃ in the top 3 pairs of the multilayer stack. The high reflectors were deposited by dual ion beam sputtering. Laser damage at 1 μm using 350 ps showed enhanced performance when the Ta₂O₅/SiO₂ stack had HfO₂ or Y₂O₃ in its top few pairs.

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D. Patel, D. Schiltz, P. F. Langton, L. Emmert, L. N. Acquaroli, C. Baumgarten, B. Reagan, J. J. Rocca, W. Rudolph, A. Markosyan, R. R. Route, M. Fejer, and C. S. Menoni "Improvements in the laser damage behavior of Ta₂O₅/SiO₂ interference coatings by modification of the top layer design", Proc. SPIE 8885, Laser-Induced Damage in Optical Materials: 2013, 888522 (19 November 2013); https://doi.org/10.1117/12.2030380

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