A three-degree-of-freedom hybrid vibration isolation system using adaptive proportional control supported by passive weight support mechanism

Yun-Hui Liu; Wei-Hao Wu; Chih-Liang Chu

doi:10.1117/12.2036172

10 October 2013 A three-degree-of-freedom hybrid vibration isolation system using adaptive proportional control supported by passive weight support mechanism

Yun-Hui Liu, Wei-Hao Wu, Chih-Liang Chu

Author Affiliations +

Proceedings Volume 8916, Sixth International Symposium on Precision Mechanical Measurements; 89161L (2013) https://doi.org/10.1117/12.2036172
Event: Sixth International Symposium on Precision Mechanical Measurements, 2013, Guiyang, China

Abstract

This paper presents a three-degree-of-freedom hybrid vibration isolation system integrated with an active sky-hook damper and a passive weight support mechanism for highly sensitive measurement equipment, e.g. atomic force microscopes, suffering from building vibration. Active sky-hook damper applies proportional controller incorporated with an adaptive filter to reduce the resonance of the passive weight support mechanism at nature frequency. The absolute vibration velocity signal acquired from an accelerator and being processed through an integrator is input to the controller as a feedback signal, and the controller output signal drives the voice coil actuator to produce a sky-hook damper force. The adaptive filter is used to compensate the phase error between the measuring input signal and the absolute vibration velocity. An analysis of this active vibration isolation system is presented, and model predictions are compared to experimental results. The results show that the system could effectively reduce transmissibility at resonance without the penalty of increased transmissibility at higher frequencies both in vertical and horizontal directions.

Citation Download Citation

Yun-Hui Liu, Wei-Hao Wu, and Chih-Liang Chu "A three-degree-of-freedom hybrid vibration isolation system using adaptive proportional control supported by passive weight support mechanism", Proc. SPIE 8916, Sixth International Symposium on Precision Mechanical Measurements, 89161L (10 October 2013); https://doi.org/10.1117/12.2036172

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