Miniaturized optical fiber Fabry-Perot interferometer fabricated by femtosecond laser irradiation and selective chemical etching

Lei Yuan; Xinwei Lan; Jie Huang; Hanzheng Wang; Baokai Cheng; Jie Liu; Hai Xiao

doi:10.1117/12.2038824

7 March 2014 Miniaturized optical fiber Fabry-Perot interferometer fabricated by femtosecond laser irradiation and selective chemical etching

Lei Yuan, Xinwei Lan, Jie Huang, Hanzheng Wang, Baokai Cheng, Jie Liu, Hai Xiao

Author Affiliations +

Proceedings Volume 8974, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII; 89741A (2014) https://doi.org/10.1117/12.2038824
Event: SPIE MOEMS-MEMS, 2014, San Francisco, California, United States

Abstract

A U-shaped optical fiber inline microchannel was fabricated by femtosecond laser irradiation and subsequent selective chemical wet etching. A high quality micro-cavity embedded inside the channel was obtained to construct a Fabry-Perot interferometer (FPI). A fringe visibility of 20 dB in spectrum domain was achieved. High temperature survivability of this micro device was also demonstrated. The proposed assembly-free optical fiber inline interferometer is attractive for sensing applications in high-temperature harsh environments.

Citation Download Citation

Lei Yuan, Xinwei Lan, Jie Huang, Hanzheng Wang, Baokai Cheng, Jie Liu, and Hai Xiao "Miniaturized optical fiber Fabry-Perot interferometer fabricated by femtosecond laser irradiation and selective chemical etching", Proc. SPIE 8974, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII, 89741A (7 March 2014); https://doi.org/10.1117/12.2038824

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available