Integrated Planar Microlens And Its Applications

M Oikawa; E Okuda; K Hamanaka; H Nemoto

doi:10.1117/12.944554

2 June 1988 Integrated Planar Microlens And Its Applications

M Oikawa, E Okuda, K Hamanaka, H Nemoto

Proceedings Volume 0898, Miniature Optics and Lasers; (1988) https://doi.org/10.1117/12.944554
Event: 1988 Los Angeles Symposium: O-E/LASE '88, 1988, Los Angeles, CA, United States

Abstract

The paper describes a monolithically integrated planar microlens array and its applications. An ion exchange technology is applied to realize the microlens array with diameters of 10 - 1000 pm and N.A. of 0.25. Applications to optical fiber communications, combinations with CCD arrays and optical computing are demonstrated.

Citation Download Citation

M Oikawa, E Okuda, K Hamanaka, and H Nemoto "Integrated Planar Microlens And Its Applications", Proc. SPIE 0898, Miniature Optics and Lasers, (2 June 1988); https://doi.org/10.1117/12.944554

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