High-speed deformation measurement using spatially phase-shifted speckle interferometry

Tobias Beckmann; Markus Fratz; Alexander Bertz; Daniel Carl

doi:10.1117/12.2037718

25 February 2014 High-speed deformation measurement using spatially phase-shifted speckle interferometry

Tobias Beckmann, Markus Fratz, Alexander Bertz, Daniel Carl

Proceedings Volume 9006, Practical Holography XXVIII: Materials and Applications; 90060E (2014) https://doi.org/10.1117/12.2037718
Event: SPIE OPTO, 2014, San Francisco, California, United States

Abstract

Electronic speckle pattern interferometry (ESPI) is a powerful technique for differential shape measurement with submicron resolution. Using spatial phase-shifting (SPS), no moving parts are required, allowing frame acquisition rates limited by camera hardware. We present ESPI images of 1 megapixel resolution at 500 fps. Analysis of SPS data involves complex, time-consuming calculations. The graphics processing units found in state-of-the-art personal computers have exceptional parallel processing capabilities, allowing real-time SPS measurements at video frame rates. Deformation analysis at this frame rate can be used to analyze transient phenomena such as transient temperature effects in integrated circuit chips or during material processing.

Citation Download Citation

Tobias Beckmann, Markus Fratz, Alexander Bertz, and Daniel Carl "High-speed deformation measurement using spatially phase-shifted speckle interferometry", Proc. SPIE 9006, Practical Holography XXVIII: Materials and Applications, 90060E (25 February 2014); https://doi.org/10.1117/12.2037718

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