Defect inspection of quartz crystal based on machine vision

Zhebo Chen; Xin Zhang; Dandan Huang

doi:10.1117/12.2038090

19 December 2013 Defect inspection of quartz crystal based on machine vision

Zhebo Chen, Xin Zhang, Dandan Huang

Proceedings Volume 9045, 2013 International Conference on Optical Instruments and Technology: Optoelectronic Imaging and Processing Technology; 90451R (2013) https://doi.org/10.1117/12.2038090
Event: International Conference on Optical Instruments and Technology (OIT2013), 2013, Beijing, China

Abstract

Quartz crystal in oscillator is the basic element in modern electronic technology. The main specification of crystal is frequency, but the surface defect will also affect the stability and working life. At present, the defect inspection of crystal is mostly accomplished with human vision inspection. A new crystal defect inspection method with machine vision is proposed in this paper. The crystal image is acquired with special angle annular dark field illumination. The relationship between the physical feature and the vision feature are discussed. Then, defect inspect algorithm of each kind of defect are designed based those relationship. A large amount of inspection experiments are executed with this algorithm, the results indicate that this method has good practical value because of high efficiencies and high accuracy.

Citation Download Citation

Zhebo Chen, Xin Zhang, and Dandan Huang "Defect inspection of quartz crystal based on machine vision", Proc. SPIE 9045, 2013 International Conference on Optical Instruments and Technology: Optoelectronic Imaging and Processing Technology, 90451R (19 December 2013); https://doi.org/10.1117/12.2038090

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