Straightness measurement system based on phase sensitive detection technique

Pei Huang; Yan Li; Haoyun Wei

doi:10.1117/12.2036576

19 December 2013 Straightness measurement system based on phase sensitive detection technique

Pei Huang, Yan Li, Haoyun Wei

Proceedings Volume 9046, 2013 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems; 90460Y (2013) https://doi.org/10.1117/12.2036576
Event: International Conference on Optical Instruments and Technology (OIT2013), 2013, Beijing, China

Abstract

This paper presents a measurement method for straightness errors based on phase sensitive detection technique. This system consists of a single-mode fiber pigtailed laser diode, a corner cube, a position sensitive detector (PSD), and electronic components¹. The beam from single mode fiber is stable, which can be used as a datum for straightness error measurement after collimation. The PSD is used to receive the beam reflected by the corner cube. To eliminate the influence of background light, the laser diode is modulated by a sinusoidal wave current and phase sensitive detection technique is developed to demodulate the signal. Compared with a laser interferometer, the measurement accuracy is better than ±0.4 μm. A repeatability test is conducted to assess the system stability by measuring a stage three times, showing that the repeatability is better than 1 μm. This system can be easily assembled to measure straightness errors of a carriage in workshop. 1 μm. This system can be easily assembled to measure straightness errors of a carriage in workshop.

Citation Download Citation

Pei Huang, Yan Li, and Haoyun Wei "Straightness measurement system based on phase sensitive detection technique", Proc. SPIE 9046, 2013 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 90460Y (19 December 2013); https://doi.org/10.1117/12.2036576

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