Organic solvent-free sugar-based transparency nanopatterning material derived from biomass for eco-friendly optical biochips using green lithography

Satoshi Takei; Akihiro Oshima; Tomoko G. Oyama; Kenta Ito; Kigenn Sugahara; Miki Kashiwakura; Takahiro Kozawa; Seiichi Tagawa

doi:10.1117/12.2045633

8 May 2014 Organic solvent-free sugar-based transparency nanopatterning material derived from biomass for eco-friendly optical biochips using green lithography

Satoshi Takei, Akihiro Oshima, Tomoko G. Oyama, Kenta Ito, Kigenn Sugahara, Miki Kashiwakura, Takahiro Kozawa, Seiichi Tagawa

Author Affiliations +

Proceedings Volume 9129, Biophotonics: Photonic Solutions for Better Health Care IV; 912917 (2014) https://doi.org/10.1117/12.2045633
Event: SPIE Photonics Europe, 2014, Brussels, Belgium

Abstract

An organic solvent-free sugar-based transparency nanopatterning material which had specific desired properties such as nanostructures of subwavelength grating and moth-eye antireflection, acceptable thermal stability of 160 °C, and low imaginary refractive index of less than 0.005 at 350-800 nm was proposed using electron beam lithography. The organic solvent-free sugar-based transparency nanopatterning material is expected for non-petroleum resources, environmental affair, safety, easiness of handling, and health of the working people, instead of the common developable process of tetramethylammonium hydroxide. 120 nm moth-eye antireflection nanopatterns images with exposure dose of 10 μC/cm² were provided by specific process conditions of electron beam lithography. The developed sugar derivatives with hydroxyl groups and EB sensitive groups in the organic solvent-free sugar-based transparency nanopatterning material were applicable to future development of optical interface films of biology and electronics as a novel chemical design.

Citation Download Citation

Satoshi Takei, Akihiro Oshima, Tomoko G. Oyama, Kenta Ito, Kigenn Sugahara, Miki Kashiwakura, Takahiro Kozawa, and Seiichi Tagawa "Organic solvent-free sugar-based transparency nanopatterning material derived from biomass for eco-friendly optical biochips using green lithography", Proc. SPIE 9129, Biophotonics: Photonic Solutions for Better Health Care IV, 912917 (8 May 2014); https://doi.org/10.1117/12.2045633

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