Paper
28 July 2014 Echelle volume phase holographic gratings: experimental results
Andrea Bianco, Lorenzo Caranzi, Mario Caironi
Author Affiliations +
Abstract
The develop of Volume Phase Holographic Gratings (VPHGs) working as echelle grating is reported based on binary structures. A mask lithography process was developed to produce the patterns on SU8 photoresist. The binary pattern with 50 l/mm were regular and defect free. The samples were characterized by different duty cycles, which is a key parameter in defining the diffraction efficiency in such binary gratings. The efficiency has been measured at different wavelengths and for different orders. The results have been compared with those obtained by simulations.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Andrea Bianco, Lorenzo Caranzi, and Mario Caironi "Echelle volume phase holographic gratings: experimental results", Proc. SPIE 9151, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation, 91511I (28 July 2014); https://doi.org/10.1117/12.2055328
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KEYWORDS
Diffraction

Photoresist materials

Binary data

Refractive index

Diffraction gratings

Holography

Photoresist developing

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