Evaluate error correction ability of magnetorheological finishing by smoothing spectral function

Jia Wang; Bin Fan; Yongjian Wan; Chunyan Shi; Bin Zhuo

doi:10.1117/12.2070675

6 August 2014 Evaluate error correction ability of magnetorheological finishing by smoothing spectral function

Jia Wang, Bin Fan, Yongjian Wan, Chunyan Shi, Bin Zhuo

Proceedings Volume 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 928115 (2014) https://doi.org/10.1117/12.2070675
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China

Abstract

Power Spectral Density (PSD) has been entrenched in optics design and manufacturing as a characterization of mid-high spatial frequency (MHSF) errors. Smoothing Spectral Function (SSF) is a newly proposed parameter that based on PSD to evaluate error correction ability of computer controlled optical surfacing (CCOS) technologies. As a typical deterministic and sub-aperture finishing technology based on CCOS, magnetorheological finishing (MRF) leads to MHSF errors inevitably. SSF is employed to research different spatial frequency error correction ability of MRF process. The surface figures and PSD curves of work-piece machined by MRF are presented. By calculating SSF curve, the correction ability of MRF for different spatial frequency errors will be indicated as a normalized numerical value.

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Jia Wang, Bin Fan, Yongjian Wan, Chunyan Shi, and Bin Zhuo "Evaluate error correction ability of magnetorheological finishing by smoothing spectral function", Proc. SPIE 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 928115 (6 August 2014); https://doi.org/10.1117/12.2070675

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KEYWORDS

Polishing

Surface finishing

Magnetorheological finishing

Spatial frequencies

Mirrors

Photovoltaics

Silicon

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