Metrology Of A Diamond Turned Toric Resonator Component

Theodore T. Saito; Jones Arnold

doi:10.1117/12.955127

16 December 1976 Metrology Of A Diamond Turned Toric Resonator Component

Theodore T. Saito, Jones Arnold

Proceedings Volume 0093, Advances in Precision Machining of Optics; (1976) https://doi.org/10.1117/12.955127
Event: 20th Annual Technical Symposium, 1976, San Diego, United States

Abstract

We describe the set up and measurement techniques to evaluate a diamond turned 300 mm diameter copper toroid. A single beam interferometer, rotary table, and Moore measuring machine were used to measure the circular flatness of 0.63 μm (25 μ") and 30 nm (1.2 μ") rms figure deviation. A computer program was used to evaluate the figure and absolute average slope error of 12 μrad.

Citation Download Citation

Theodore T. Saito and Jones Arnold "Metrology Of A Diamond Turned Toric Resonator Component", Proc. SPIE 0093, Advances in Precision Machining of Optics, (16 December 1976); https://doi.org/10.1117/12.955127

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