Fiber-coupled Fabry-Pérot notch filter combining in-plane axis, high speed MEMS tunability and large etching depth

Yasser M. Sabry; Yomna M. Eltagoury; Ahmed Shebl; Mostafa Soliman; Diaa Khalil

doi:10.1117/12.2078155

27 February 2015 Fiber-coupled Fabry-Pérot notch filter combining in-plane axis, high speed MEMS tunability and large etching depth

Yasser M. Sabry, Yomna M. Eltagoury, Ahmed Shebl, Mostafa Soliman, Diaa Khalil

Author Affiliations +

Proceedings Volume 9375, MOEMS and Miniaturized Systems XIV; 93750U (2015) https://doi.org/10.1117/12.2078155
Event: SPIE OPTO, 2015, San Francisco, California, United States

Abstract

Notch filters based on fiber-coupled Fabry-Pérot cavity are formed by a reflector placed in close proximity to a dielectric-coated end of an optical fiber. This kind of optical filters is easy to tailor for a given application because the external mirror has less mechanical and optical constraints. In this paper we present a fiber-coupled Fabry-Pérot filter based on dielectric-coated optical fiber inserted into a fiber groove facing a metallized micromirror, where the latter is driven by a high-speed MEMS actuator. The microsystem is fabricated using Deep Reactive Ion Etching (DRIE) technology on SOI wafer. The optical axis is in-plane and the components are self-aligned. The DRIE etching depth is 150 μm; chosen for improving the out-of-plane stiffness of the actuator and increasing the micromirror optical throughput. The MEMS actuator type is closing-gap while its quality factor is improved by slotting the fixed plate. The actuator, therefore, achieves a travel distance larger than 800 nm and has a resonance frequency of 90 kHz. The notch filter exhibits a free spectral range up to 100 nm and a notch rejection ratio of 20 dB around a wavelength of 1300 nm. The presented device provides low cost wafer level production of the filter.

Citation Download Citation

Yasser M. Sabry, Yomna M. Eltagoury, Ahmed Shebl, Mostafa Soliman, and Diaa Khalil "Fiber-coupled Fabry-Pérot notch filter combining in-plane axis, high speed MEMS tunability and large etching depth", Proc. SPIE 9375, MOEMS and Miniaturized Systems XIV, 93750U (27 February 2015); https://doi.org/10.1117/12.2078155

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