The next generation of MEMS-based optical microspectrometers

Reinoud F. Wolffenbuttel

doi:10.1117/12.2179059

21 May 2015 The next generation of MEMS-based optical microspectrometers

Reinoud F. Wolffenbuttel

Proceedings Volume 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems; 95170I (2015) https://doi.org/10.1117/12.2179059
Event: SPIE Microtechnologies, 2015, Barcelona, Spain

Abstract

MEMS-based optical microspectrometers are typically composed of MEMS devices for operation as dispersive element or as tunable resonator within an optical system. CMOS-compatible MEMS technologies enable on-chip integration of the MEMS optical components, detector and readout circuits. The actual realization and exploitation of this on-chip functional integration of the entire microspectrometer imposes several challenges. The state-of-the-art and some of the technology and design challenges will be outlined, followed by an introduction to some of the trends and upcoming application of high potential.

Citation Download Citation

Reinoud F. Wolffenbuttel "The next generation of MEMS-based optical microspectrometers", Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170I (21 May 2015); https://doi.org/10.1117/12.2179059

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