Real-time multi-point diffraction-based imaging system (ReMuDis) for strain measurement

Wing Onn Koh; Hui Zhu

doi:10.1117/12.2189286

23 July 2015 Real-time multi-point diffraction-based imaging system (ReMuDis) for strain measurement

Wing Onn Koh, Hui Zhu

Proceedings Volume 9524, International Conference on Optical and Photonic Engineering (icOPEN 2015); 952416 (2015) https://doi.org/10.1117/12.2189286
Event: International Conference on Optical and Photonic Engineering (icOPEN2015), 2015, Singapore, Singapore

Abstract

In this paper, we propose a real-time solution based on multi-point diffraction-based interferometer that is capable of 2-dimensional full-field, in-plane strain measurement and analysis with micrometric sensitivity and accuracy. We discuss the various techniques used to provide real-time dynamic analysis of strain over space and time so as to highlight trends of potential in-situ stress build-up over a device.

Citation Download Citation

Wing Onn Koh and Hui Zhu "Real-time multi-point diffraction-based imaging system (ReMuDis) for strain measurement", Proc. SPIE 9524, International Conference on Optical and Photonic Engineering (icOPEN 2015), 952416 (23 July 2015); https://doi.org/10.1117/12.2189286

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