Scan Interferometer

P. Langenbeck; P. Gerspacher; D. Muller

doi:10.1117/12.947574

16 January 1989 Scan Interferometer

P. Langenbeck, P. Gerspacher, D. Muller

Proceedings Volume 0954, Optical Testing and Metrology II; (1989) https://doi.org/10.1117/12.947574
Event: SPIE International Symposium on Optical Engineering and Industrial Sensing for Advance Manufacturing Technologies, 1988, Dearborn, MI, United States

Abstract

Combining surface interferometry of limited aperture with automatic evaluation by phase shift and with ultra precision kinematics allows to scan large surfaces or bodies of revolution and produce a composed interferogram covering the entire surface.

Citation Download Citation

P. Langenbeck, P. Gerspacher, and D. Muller "Scan Interferometer", Proc. SPIE 0954, Optical Testing and Metrology II, (16 January 1989); https://doi.org/10.1117/12.947574

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