Paper
16 January 1989 What Can Be Interferometered?
P. Langenbeck
Author Affiliations +
Proceedings Volume 0954, Optical Testing and Metrology II; (1989) https://doi.org/10.1117/12.947573
Event: SPIE International Symposium on Optical Engineering and Industrial Sensing for Advance Manufacturing Technologies, 1988, Dearborn, MI, United States
Abstract
Interferometry applied to engineering surfaces - many more than strictly optical can be interferometered with ACAI*. Is ACAI telling the truth?
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
P. Langenbeck "What Can Be Interferometered?", Proc. SPIE 0954, Optical Testing and Metrology II, (16 January 1989); https://doi.org/10.1117/12.947573
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KEYWORDS
Interferometry

Phase shifts

Sensors

Ceramics

Optics manufacturing

Interferometers

Polishing

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