Therefore after each fabrication step we want to know how the surface features at different lateral sizes evolved, so that we can optimize the choice of the next fabrication step. A spec like PSD often doesn’t inform the fabricator whether it’s failing because of a localized error (such as edge roll), continuous texture, or an artifact of metrology or computation. So while it may indicate the need for additional fabrication steps, it is not ideal for guiding specifically which fabrication step ought to be undertaken next. We have developed analyses to help determine what surface characteristics are failing spec, and thus optimize the next fabrication step. Finally, we demonstrate an example of how we have applied these techniques to fabricate parts with demanding slope and MSF specifications. |
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CITATIONS
Cited by 3 scholarly publications.
Polishing
Photovoltaics
Spatial frequencies
Surface finishing
Tolerancing
Metrology
Optical fabrication