Smoothing of optical surface corners by abrasive polishing with a plate spring

Hideo Takino; Yusuke Saito; Kazuya Tsuji; Naoki Mouri

doi:10.1117/12.2196080

11 October 2015 Smoothing of optical surface corners by abrasive polishing with a plate spring

Hideo Takino, Yusuke Saito, Kazuya Tsuji, Naoki Mouri

Proceedings Volume 9633, Optifab 2015; 96330N (2015) https://doi.org/10.1117/12.2196080
Event: SPIE Optifab, 2015, Rochester, New York, United States

Abstract

We propose a new method for polishing the corners of optical surfaces that uses a plate spring as a polishing tool. In this method, a polishing pad is fixed to the tip of a plate spring, which moves back and forth on a workpiece surface. During the polishing, the plate spring is bent while maintaining a constant amount of deflection to generate a stable polishing load. The edge of the plate spring enables the polishing of the corners of the workpiece. We have developed a polishing machine with a plate spring, and we performed polishing experiments on silicon plates to investigate the fundamental characteristics of our proposed method. It was found that the roughness of workpiece surfaces decreases with the progress of polishing and that the areas are polished almost uniformly, demonstrating the effectiveness of our polishing method.

Citation Download Citation

Hideo Takino, Yusuke Saito, Kazuya Tsuji, and Naoki Mouri "Smoothing of optical surface corners by abrasive polishing with a plate spring", Proc. SPIE 9633, Optifab 2015, 96330N (11 October 2015); https://doi.org/10.1117/12.2196080

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available