A novel method about online monitoring surface shape of optical elements in continuous polishing

Jin Yin; Jianqiang Zhu; Xiang Jiao; Yongzhong Wu

doi:10.1117/12.2242247

28 October 2016 A novel method about online monitoring surface shape of optical elements in continuous polishing

Jin Yin, Jianqiang Zhu, Xiang Jiao, Yongzhong Wu

Proceedings Volume 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 96831L (2016) https://doi.org/10.1117/12.2242247
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

In conventional continuous polishing process, the surface shape of work-piece was measured by an optical plane template after being placed in such environment with constant temperature for 1 to 2 hours. During this period, uncertain influence may occur on the polishing pad due to the change of system state. Meanwhile, the regular off-line testing may cause re-processing. In this paper, a new method about on-line monitoring surface shape of optical elements is proposed by the theory of run sphere, and the change in curvature radius of the work-piece which lead to its radial tilt angle change. The change in work-piece surface shape indirectly obtain by the correction plate small angle with respect to the horizontal, and the angle were detected on line by the high-precision goniometer with the resolution 0.04 ''. According to theoretical calculations, the diameter of 200mm precision work-piece PV value up to 0.02λ (λ = 632.8nm). The fused quartz glass was measured by above method. The test results showed that the surface accuracy and processing efficiency were significantly promoted, and also improving the controllability of surface shape of work-piece based on this method.

Citation Download Citation

Jin Yin, Jianqiang Zhu, Xiang Jiao, and Yongzhong Wu "A novel method about online monitoring surface shape of optical elements in continuous polishing", Proc. SPIE 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 96831L (28 October 2016); https://doi.org/10.1117/12.2242247

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