Detection of terahertz radiation using improved uncooled focal plane array detector

Xing Zheng; Zhiming Wu; Jun Gou; ZhiQing Liang; Yadong Jiang

doi:10.1117/12.2242405

25 October 2016 Detection of terahertz radiation using improved uncooled focal plane array detector

Xing Zheng, Zhiming Wu, Jun Gou, ZhiQing Liang, Yadong Jiang

Proceedings Volume 9686, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices; 96861J (2016) https://doi.org/10.1117/12.2242405
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

A terahertz (THz) microbolometer detector and corresponding real-time imaging system were introduced in this paper. A 10nm NiCr thin film was integrated in the micro-bridge structure as the THz absorption layer by magnetron sputtering and reactive ion etching (RIE), and its improvement of THz absorption was verified by optical characteristics test. Through complicated semiconductor process, a microbolometer detector of 320×240 THz focal plane array (FPA) was prepared. And a real-time imaging system was established to identify the perfomance of this detector. The results demonstrated that the detector could get conscious THz image using a 2.52 THz far-infrared gas laser as THz radiation source.

Citation Download Citation

Xing Zheng, Zhiming Wu, Jun Gou, ZhiQing Liang, and Yadong Jiang "Detection of terahertz radiation using improved uncooled focal plane array detector", Proc. SPIE 9686, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices, 96861J (25 October 2016); https://doi.org/10.1117/12.2242405

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KEYWORDS

Terahertz radiation

Absorption

Sensors

Staring arrays

Microbolometers

Imaging systems

Reactive ion etching

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