High accuracy measurement of power spectral density in middle spatial frequency range of optical surfaces using optical profiler

Xudong Xu; Shuang Ma; Zhengxiang Shen; Qiushi Huang; Zhanshan Wang

doi:10.1117/12.2243152

25 October 2016 High accuracy measurement of power spectral density in middle spatial frequency range of optical surfaces using optical profiler

Xudong Xu, Shuang Ma, Zhengxiang Shen, Qiushi Huang, Zhanshan Wang

Author Affiliations +

Proceedings Volume 9687, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subnanometer Accuracy Measurement for Synchrotron Optics and X-Ray Optics; 968707 (2016) https://doi.org/10.1117/12.2243152
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

The scattering from residual optical fabrication errors in the middle spatial frequency range limits the resolution and signal-to-noise ratio of optical systems. An optical profiler is a useful tool for characterization of residual surface roughness for middle spatial frequencies. An accurate calibration and measurement strategy of the optical profiler are critical for accurate optical metrology. In this manuscript, the optical profiler is calibrated using two methods. The first one is the median filter method, based on the oblique line power spectral density of a super-smooth surface. The super-smooth surface was considered as a standard and the measured data were calibrated for a normal optical surface. The use of the median filter enables us to extend the effective frequency of the measured data. The second method applies multiple measurement and is built on the primary spectral characteristics of white noise: a random signal with a constant power spectral density and an oblique line power spectral density for a fractal surface. Through multiple measurement, the white noise decreases and more accurate values for the surface height can be obtained. Both methods can extend the ranges of effective spatial frequency and optimize the capability and utilization of the optical profiler.

Citation Download Citation

Xudong Xu, Shuang Ma, Zhengxiang Shen, Qiushi Huang, and Zhanshan Wang "High accuracy measurement of power spectral density in middle spatial frequency range of optical surfaces using optical profiler", Proc. SPIE 9687, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subnanometer Accuracy Measurement for Synchrotron Optics and X-Ray Optics, 968707 (25 October 2016); https://doi.org/10.1117/12.2243152

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available