Quantitative phase contrast imaging using a Nomarski microscope with variable shear distance

Claas Falldorf; Mostafa Agour; Jonas Kötter; Ralf B. Bergmann

doi:10.1117/12.2212757

9 March 2016 Quantitative phase contrast imaging using a Nomarski microscope with variable shear distance

Claas Falldorf, Mostafa Agour, Jonas Kötter, Ralf B. Bergmann

Proceedings Volume 9718, Quantitative Phase Imaging II; 97182I (2016) https://doi.org/10.1117/12.2212757
Event: SPIE BiOS, 2016, San Francisco, California, United States

Abstract

We present a Nomarski microscope with variable shear distance that allows for determining the full complex modulation function including the quantitative phase contrast that a specimen imposes on incident light, rather than only its differential phase contrast. The system preserves all beneficial properties of the Nomarski setup with respect to coherence and stability. Hence, we can measure the quantitative phase contrast under Köhler illumination with full condenser aperture and without vibration isolation. We will explain the system, give an analysis of the coherence requirements and provide an example from the field of MEMS inspection.

Conference Presentation

Citation Download Citation

Claas Falldorf, Mostafa Agour, Jonas Kötter, and Ralf B. Bergmann "Quantitative phase contrast imaging using a Nomarski microscope with variable shear distance", Proc. SPIE 9718, Quantitative Phase Imaging II, 97182I (9 March 2016); https://doi.org/10.1117/12.2212757

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