Large area micro-/nano-structuring using direct laser interference patterning

Andrés F. Lasagni; Tim Kunze; Matthias Bieda; Denise Günther; Anne Gärtner; Valentin Lang; Andreas Rank; Teja Roch

doi:10.1117/12.2214948

14 March 2016 Large area micro-/nano-structuring using direct laser interference patterning

Andrés F. Lasagni, Tim Kunze, Matthias Bieda, Denise Günther, Anne Gärtner, Valentin Lang, Andreas Rank, Teja Roch

Proceedings Volume 9735, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI; 973515 (2016) https://doi.org/10.1117/12.2214948
Event: SPIE LASE, 2016, San Francisco, California, United States

Abstract

Smart surfaces are a source of innovation in the 21st Century. Potential applications can be found in a wide range of fields where improved optical, mechanical or biological properties can enhance the functions of products. In the last years, a method called Direct Laser Interference Patterning (DLIP) has demonstrated to be capable of fabricating a wide range of periodic surface patterns even with resolution at the nanometer and sub-micrometer scales. This article describes recent advances of the DLIP method to process 2D and 3D parts. Firstly, the possibility to fabricate periodic arrays on metallic substrates with sub-micrometer resolution is shown. After that, different concepts to process three dimensional parts are shown, including the use of Cartesian translational stages as well as an industrial robot arm. Finally, some application examples are described.

Citation Download Citation

Andrés F. Lasagni, Tim Kunze, Matthias Bieda, Denise Günther, Anne Gärtner, Valentin Lang, Andreas Rank, and Teja Roch "Large area micro-/nano-structuring using direct laser interference patterning", Proc. SPIE 9735, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI, 973515 (14 March 2016); https://doi.org/10.1117/12.2214948

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