Two-stage soft x-ray focusing system developed at BL1 of SACLA

Hiroto Motoyama; Satoru Egawa; Gota Yamaguchi; Shigeki Owada; Takashi Kimura; Makina Yabashi; Hidekazu Mimura

doi:10.1117/12.2682630

4 October 2023 Two-stage soft x-ray focusing system developed at BL1 of SACLA

Hiroto Motoyama, Satoru Egawa, Gota Yamaguchi, Shigeki Owada, Takashi Kimura, Makina Yabashi, Hidekazu Mimura

Proceedings Volume PC12694, Advances in X-Ray/EUV Optics and Components XVIII; PC1269408 (2023) https://doi.org/10.1117/12.2682630
Event: SPIE Optical Engineering + Applications, 2023, San Diego, California, United States

Abstract

We have developed a two-stage soft X-ray focusing system at BL1 of SACLA. The system consists of two free-form mirrors, a ring focusing mirror and a quasi ellipsoidal mirror. Soft X-rays with photon energies around 120 eV can be focused down to φ350 nm. By using its unique intensity pattern after focusing, we propose a background-free signal detection method for extremely low optical signals such as SHG of soft X-ray.

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Citation Download Citation

Hiroto Motoyama, Satoru Egawa, Gota Yamaguchi, Shigeki Owada, Takashi Kimura, Makina Yabashi, and Hidekazu Mimura "Two-stage soft x-ray focusing system developed at BL1 of SACLA", Proc. SPIE PC12694, Advances in X-Ray/EUV Optics and Components XVIII, PC1269408 (4 October 2023); https://doi.org/10.1117/12.2682630

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