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13 March 2024 Laser chemical processing of layered films and etching of semiconductors
Costas P. Grigoropoulos, Yoonsoo Rho, Matthew Eliceiri, Runxuan Li
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Proceedings Volume PC12874, Nanoscale and Quantum Materials: From Synthesis and Laser Processing to Applications 2024; PC1287402 (2024) https://doi.org/10.1117/12.3004187
Event: SPIE LASE, 2024, San Francisco, California, United States
Abstract
This presentation summarizes recent work at the Laser Thermal Laboratory on the laser-aided processing and functionalization of two-dimensional (2D) layered materials and the laser chemical processing of semiconductors.
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Costas P. Grigoropoulos, Yoonsoo Rho, Matthew Eliceiri, and Runxuan Li "Laser chemical processing of layered films and etching of semiconductors", Proc. SPIE PC12874, Nanoscale and Quantum Materials: From Synthesis and Laser Processing to Applications 2024, PC1287402 (13 March 2024); https://doi.org/10.1117/12.3004187
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KEYWORDS
Laser processing
Chemical lasers
Semiconductor lasers
Chemical reactions
Etching
Semiconductors
Atomic layer etching
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