CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume PC12895 > Article
Presentation
9 March 2024 Fabrication of monolithic subwavelength high-aspect ratio GaAs gratings integrated with metal for transmission of unpolarized infrared light
Karolina Bogdanowicz, Weronika Glowadzka, Oskar Sadowski, Tristan Smolka, Michal Rygala, Marcin Motyka, Marek Ekielski, Tomasz Czyszanowski, Anna Szerling
Author Affiliations +
Proceedings Volume PC12895, Quantum Sensing and Nano Electronics and Photonics XX; PC128951C (2024) https://doi.org/10.1117/12.3000495
Event: SPIE OPTO, 2024, San Francisco, California, United States
Abstract
Monolithic subwavelength gratings integrated with metal (metalMHCG) enable nearly total transmission of light and can be fabricated with common semiconductor materials, however, they require a very high-aspect ratio between height and period of the metalMHCG stripes which is technologically challenging. This study aims the optimization of metalMHCG fabrication procedure by plasma etching taking into account the influence of process gas flow, their composition, pressure, power, and temperature on the wall shape of metaMHCG, etch rate, and etch selectivity. In the result, metalMHCG with high-aspect ratio and dimensions enabling nearly total transmission are fabricated.
Conference Presentation
© (2024) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Karolina Bogdanowicz, Weronika Glowadzka, Oskar Sadowski, Tristan Smolka, Michal Rygala, Marcin Motyka, Marek Ekielski, Tomasz Czyszanowski, and Anna Szerling "Fabrication of monolithic subwavelength high-aspect ratio GaAs gratings integrated with metal for transmission of unpolarized infrared light", Proc. SPIE PC12895, Quantum Sensing and Nano Electronics and Photonics XX, PC128951C (9 March 2024); https://doi.org/10.1117/12.3000495
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 PRESENTATION
WATCH
PRESENTATION SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
KEYWORDS
Optical gratings
Fabrication
Gallium arsenide
Infrared radiation
Metals
Polarized light
Etching
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top