Editor-in-Chief Hans Zappe summarizes JOM’s first year in publication.

We provide a review of the latest research findings as well as the future potential of plasma-based etching technology for the fabrication of micro-optical components and systems. Reactive ion etching (RIE) in combination with lithographic patterning is a well-established technology in the field of micro- and nanofabrication. Nevertheless, practical implementation, especially for plasma-based patterning of complex optical materials such as alumino-silicate glasses or glass-ceramics, is still largely based on technological experience rather than established models. Such models require an in-depth understanding of the underlying chemical and physical processes within the plasma and at the glass–plasma/mask–plasma interfaces. We therefore present results that should pave the way for a better understanding of processes and thus for the extension of RIE processes toward innovative three-dimensional (3D) patterning as well as for the processing of chemically and structurally inhomogeneous silicate-based substrates. To this end, we present and discuss the results of a variety of microstructuring strategies for different application areas with a focus on micro-optics. We consider the requirements for refractive and diffractive micro-optical systems and highlight potentials for 3D dry chemical etching by selective tailoring of the material structure. The results thus provide first steps toward a knowledge-based approach to RIE processing of universal dielectric glass materials for optical microsystems, which also has a significant impact on other microscale applications.

We report a two-axis water-immersible microscanning mirror using torsional and bending biaxially oriented polyethylene terephthalate hinges. Two different designs based on a four- or single-coil electromagnetic actuator are investigated. A micromachining-based fabrication process is developed to enable high patterning resolution and alignment accuracy and to reduce the amount of manual assembly. With a torsional hinge, the fast axis has a resonance frequency of 300 to 500 Hz in air and 200 to 400 Hz in water. With a bending hinge, the slow axis has a resonance frequency of 60 to 70 Hz in air and 20 to 40 Hz in water. 2D B-scan and 3D volumetric ultrasound microscopy are demonstrated using the hybrid-hinge scanning mirror. The ability of scanning the slow axis at DC or very low frequencies allows a dense raster scanning pattern to be formed for improving both the imaging resolution and field of view.

An optofluidic component actuated by electrowetting-on-dielectrics capable of simultaneously deflecting and shaping a beam in two dimensions, using a single liquid–liquid interface, is presented. The device features 32 individually addressable electrodes through which the interface is shaped using an open-loop control method to generate arbitrary surfaces. During steering-only operation, the resulting liquid prism can be rotated continuously with a repeatability of ±0.071  deg for individual positions. By choosing an appropriate surface shape, for example, it is possible to form a cylindrical lens, expanding the beam in only one axis, or to dynamically tune the scanned beam width. The presented results provide insights into the possibilities resulting from more complex surface control of optofluidic devices.

A method to drastically enhance detection efficiency of a linear variable filter (LVF) sensor across an extended and continuous wavelength range is presented. The efficiency is increased by a wavelength preselection concept, where the incoming light is divided into partial spectra to reduce otherwise unavoidable reflection losses of filter-based spectrometers. The simple but effective setup uses selected and successively arranged dichroic beamsplitters, which ensures an optimized compromise between efficiency enhancement and minimum increasing complexity. When connected to a two-dimensional camera and combined with a tilted LVF, this compact optical system allows the continuous recording of the full wavelength range between 450 and 850 nm with a resolution of ∼19  nm at 508.6 nm. An efficiency enhancement factor of up to 5.7 is achieved in comparison to a conventional LVF setup. The working principle was verified by measuring the reflection spectra of different natural and artificial green leaves. The proposed approach for increasing the efficiency can be miniaturized and applied to a broad range of other filter-based sensors.

We present the design and feasibility testing of a multimodal co-registered endoscope based on a dual-path optical system integrated with a scanning piezo. This endoscope incorporates three different imaging modalities. A large field-of-view (FOV) reflectance imaging system enables visualization of objects several millimeters in front of the endoscope, while optical coherence microscopy (OCM) and multiphoton microscopy (MPM) are employed in contact with tissue to further analyze suspicious areas. The optical system allows multiple different imaging modalities by employing a dual optical path. One path features a low numerical aperture (NA) and wide FOV to allow reflectance imaging of distant objects. The other path features a high NA and short working distance to allow microscopy techniques such as OCM and MPM. Images of test targets were obtained with each imaging modality to verify and characterize the imaging capabilities of the endoscope. The reflectance modality was demonstrated with a 561 nm laser to allow high contrast with blood vessels. It achieved a lateral resolution of 24.8  μm at 5 mm and a working distance from 5 to 30 mm. OCM was performed with a 1300 nm super-luminescent diode since this wavelength experiences low relative scattering to allow for deeper tissue imaging. Measured OCM lateral and axial resolution was 4.0 and 14.2  μm, respectively. MPM was performed with a custom 1400 nm femtosecond fiber laser, a wavelength suitable for exciting multiple exogenous, and some endogenous fluorophores, as well as providing information on tissue composition through harmonic generation processes. A 4.0  ⁢  μm MPM lateral resolution was measured.

This erratum corrects errors in the reference list.