Automatic Electron-Beam Deposition Of Multilayer Soft X-Ray Coatings With Laterally Graded D-Spacing

M. P. Bruijn; P. Chakraborty; H. W. van Essen; J. Verhoeven; M. J. van der Wiel

doi:10.1117/12.7973930

1 August 1986 Automatic Electron-Beam Deposition Of Multilayer Soft X-Ray Coatings With Laterally Graded D-Spacing

M. P. Bruijn, P. Chakraborty, H. W. van Essen, J. Verhoeven, M. J. van der Wiel

Author Affiliations +

Optical Engineering, Vol. 25, Issue 8, 258916 (August 1986). https://doi.org/10.1117/12.7973930

Abstract

A computer-controlled electron-beam evaporation system is described that allows fully automated production of soft x-ray reflection coatings with laterally graded d-spacings. Thickness control is done by a combination of measurement of the evaporation rate with a quadrupole mass spectrometer and measurement of the soft x-ray reflection coefficient on a reference substrate during deposition. Graded thickness is obtained by computer-controlled movement of shutters. A result is given for automatic deposition of a multilayer coating. The first results for deposition of a multilayer soft x-ray coating with linearly varying d-spacing are presented.

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M. P. Bruijn, P. Chakraborty, H. W. van Essen, J. Verhoeven, and M. J. van der Wiel "Automatic Electron-Beam Deposition Of Multilayer Soft X-Ray Coatings With Laterally Graded D-Spacing," Optical Engineering 25(8), 258916 (1 August 1986). https://doi.org/10.1117/12.7973930

Published: 1 August 1986

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