Gerard Luppino, Natale Ceglio, John Doty, George Ricker, John Vallerga
Optical Engineering, Vol. 26, Issue 10, 261048, (October 1987) https://doi.org/10.1117/12.7974193
TOPICS: Imaging spectroscopy, Charge-coupled devices, X-rays, Imaging systems, Spectroscopy, X-ray imaging, Spectroscopes, Spatial resolution, X-ray detectors, Carbon
This paper describes the design and performance of a laboratory instrument for imaging and nondispersive spectroscopy of soft x rays (300 eV to 10 keV) utilizing the Texas Instruments TI-4849 virtual-phase CCD. This instrument has achieved a spatial resolution of 22 p.m (limited by pixel size) with an overall array area of 584x390 pixels. It has achieved an energy resolution of ~140 eV FWHM for single-pixel 55Fe x-ray events (5.9 keV) with the CCD operated at -30°C. We have operated the CCD in photon-counting mode at room temperature and have obtained x-ray spectra with an energy resolution of ~450 eV at 5.9 keV. The low energy x-ray sensitivity of the CCD also has been demonstrated by detecting carbon Ka x rays (277 eV).