Micromachined electromagnetic scanning mirrors

Raanan A. Miller; Yu-Chong Tai

doi:10.1117/1.601348

1 May 1997 Micromachined electromagnetic scanning mirrors

Raanan A. Miller, Yu-Chong Tai

Optical Engineering, Vol. 36, Issue 5, (May 1997). https://doi.org/10.1117/1.601348

We report a new magnetic MEMS technology that enables many electromagnetic MEMS devices. This new technology combines magnetic thin films and silicon bulk micromachining. Its use is demonstrated by two types of millimeter-sized analog scanning mirrors that are capable of delivering deflection angles exceeding 60 deg. Details include the design, fabrication, operation, as well as a complete electromechanical model of the mirrors. In addition, the use of the mirrors is further manifested in a holographic data storage system where hundreds of holograms have been successfully stored and retrieved.

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Raanan A. Miller and Yu-Chong Tai "Micromachined electromagnetic scanning mirrors," Optical Engineering 36(5), (1 May 1997). https://doi.org/10.1117/1.601348

Published: 1 May 1997

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