Xin Du, Tahar Touam, L. Degachi, J. Guilbault, Mark Andrews, S. Iraj Najafi
Optical Engineering, Vol. 37, Issue 04, (April 1998) https://doi.org/10.1117/1.601833
TOPICS: Sol-gels, Waveguides, Refractive index, Zirconium, Ultraviolet radiation, Aluminum, Silicon, Glasses, Integrated optics, Photonics
Waveguides have been fabricated by a hybrid organic- inorganic glass sol-gel process and ultraviolet-light exposure. The adjustment of chemical composition of the materials provides precise selection of the refractive index from 1.48 to 1.52 at the wavelength of 632.8 nm. The effect of ultraviolet-light exposure and heat treatment on the refractive index is studied. Ultraviolet-light inscription has been employed to produce ridge waveguides with smooth sidewalls.