Method for the deviation inspection of integrated circuit chip pin based on Harr wavelet transform

Gang Luo; Hui Fang; ZhiLiang Fang; Guoguang Mu

doi:10.1117/1.602549

1 June 2000 Method for the deviation inspection of integrated circuit chip pin based on Harr wavelet transform

Gang Luo, Hui Fang, ZhiLiang Fang, Guoguang Mu

Optical Engineering, Vol. 39, Issue 6, (June 2000). https://doi.org/10.1117/1.602549

A fast method for chip pin location inspection based on the Harr wavelet transform is presented. A cross line at the pin tip is analyzed, and the method locates the central line of a pin according to the zero crossing position of the transform of the 1-D cross line without theoretical error. The requirement of being theoretically error free is that the constant segment of the pin image is wider than 2 pixels. The experiment shows a measurement precision of 1/40 pixel.

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Gang Luo, Hui Fang, ZhiLiang Fang, and Guoguang Mu "Method for the deviation inspection of integrated circuit chip pin based on Harr wavelet transform," Optical Engineering 39(6), (1 June 2000). https://doi.org/10.1117/1.602549

Published: 1 June 2000

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