Bundled aluminum hollow-core fibers for delivery of ultraviolet laser beams

Yilmaz Ozgur; Yuji Matsuura; Mitsunobu Miyagi

doi:10.1117/1.2077047

1 October 2005 Bundled aluminum hollow-core fibers for delivery of ultraviolet laser beams

Yilmaz Ozgur, Yuji Matsuura, Mitsunobu Miyagi

Author Affiliations +

Optical Engineering, Vol. 44, Issue 10, 106501 (October 2005). https://doi.org/10.1117/1.2077047

Abstract

A bundle of aluminum hollow-core fibers is used to deliver ArF-excimer-laser light. The hollow cores are purged by a simple gas injection system to prevent the generation of ozone gas. For a 1-m-long bundle that is composed of 40 fibers each with an inner diameter of 0.7 mm, the straight loss is about 1.2 dB. The bundle also offers advantages of easy beam coupling and a high damage threshold.

©(2005) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Yilmaz Ozgur, Yuji Matsuura, and Mitsunobu Miyagi "Bundled aluminum hollow-core fibers for delivery of ultraviolet laser beams," Optical Engineering 44(10), 106501 (1 October 2005). https://doi.org/10.1117/1.2077047

Published: 1 October 2005

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