7 May 2014 Highly efficient polarization-independent grating coupler used in silica-based hybrid photodetector integration
Hongqiang Li, Yu Liu, Meiling Zhang, Wenqian Zhou, Cheng Zhang, Enbang Li, Changyun Miao, Chunxiao Tang
Author Affiliations +
Abstract
A highly efficient polarization-independent output grating coupler was optimized and designed based on silicon-on-insulator used for silica-based hybrid photodetector integration in an arrayed waveguide grating demodulation-integrated microsystem. The finite-difference time-domain (FDTD) method optimizes coupling efficiency by enabling the design of the grating period, duty cycle, etch depth, grating length, and polarization-dependent loss (PDL). The output coupling efficiencies of both the transverse electric (TE) and transverse magnetic (TM) modes are higher than 60% at 1517 to 1605 nm and ∼67% at around 1550 nm. The designed grating exhibits the desired property at the 3-dB bandwidth of 200 nm from 1450 to 1650 nm and a PDL <0.5  dB of 110 nm from 1513 to 1623 nm. The power absorption efficiency at 1550 nm for TE and TM modes reaches 78% and 70%, respectively. Both the power absorption efficiency of TE mode and that of TM mode are over 70% in a broad band of 1491 to 1550 nm.
© 2014 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2014/$25.00 © 2014 SPIE
Hongqiang Li, Yu Liu, Meiling Zhang, Wenqian Zhou, Cheng Zhang, Enbang Li, Changyun Miao, and Chunxiao Tang "Highly efficient polarization-independent grating coupler used in silica-based hybrid photodetector integration," Optical Engineering 53(5), 057105 (7 May 2014). https://doi.org/10.1117/1.OE.53.5.057105
Published: 7 May 2014
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CITATIONS
Cited by 7 scholarly publications and 2 patents.
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KEYWORDS
Silica

Photodetectors

Etching

Waveguides

Optical design

Silicon

Absorption

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